HASUNUMA Ryu
- Affiliation
- Institute of Pure and Applied Sciences
- Official title
- Associate Professor
- C%|02+2*|I/62I#2@OK2I102(2}|I| I'-V
- Office
- 3F612
- Fax
- 029-853-5205
- Research keywords
SiC Si reliability SiO2 - Degree
2001-03 博士(工学) Waseda University - Academic societies
2006-02 -- (current) Electrochemical Society 2006-02 -- (current) Institute of Electrical and Electronics Engineers (IEEE) 1994-02 -- (current) The Japan Society of Applied Physics - Articles
- Systematic Search for Stabilizing Dopants in ZrO2 and HfO2 Using First-Principles Calculations
Harashima Yosuke; Koga Hiroaki; Ni Zeyuan; Yonehara T...
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING/36(4)/pp.543-546, 2023-11 - Finite temperature effects on the structural stability of Si-doped HfO2 using first-principles calculations
Harashima Y.; Koga H.; Ni Z.; Yonehara T.; Katouda M...
APPLIED PHYSICS LETTERS/122(26), 2023-06-26 - Vacancy-type defects in TiN/ZrO2/TiN capacitors probed by monoenergetic positron beams
Uedono Akira; Takahashi Naomichi; Hasunuma Ryu; Harash...
THIN SOLID FILMS/762, 2022-11 - Experimental and theoretical studies on atomic structures of the interface states at SiO2/4H-SiC(0001) interface
Yamashita Yoshiyuki; Nara Jun; Indari Efi Dwi; Yamasak...
JOURNAL OF APPLIED PHYSICS/131(21), 2022-06 - Free carrier density enhancement of 4H-SiC Si-face MOSFET by Ba diffusion process and NO passivation
Sekine Shogo; Okada Masakazu; Kumazawa Teruaki; Someta...
JAPANESE JOURNAL OF APPLIED PHYSICS/60(SB::B), 2021-05 - Relationship between band-offset, gate leakage current, and interface states density at SiO2/4H-SiC (000-1) interface
山下 良之; INDARI Efi Dwi; 蓮沼 隆; 山部 紀久夫
Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science/2019/p.1Ga02, 2019 - Time Dependent Percolation Analysis of the Degradation of Coherent Tunneling in Ultra-Thin CoFeB/MgO/CoFeB Magnetic Tunneling Junctions
Hosotani Keiji; Nagamine Makoto; Hasunuma Ryu
IEICE TRANSACTIONS ON ELECTRONICS/E103C(5)/pp.254-262, 2020-05 - Relationship between electrical properties and interface structures of SiO2/4H-SiC prepared by dry and wet oxidation
Indari Efi Dwi; Yamashita Yoshiyuki; Hasunuma Ryu; Oji...
AIP ADVANCES/9(10), 2019-10 - Spectroscopic Observation of the Interface States at the SiO2/4H-SiC(0001) Interface
Yamashita Yoshiyuki; Nagata Takahiro; Chikyow Toyohiro...
e-Journal of Surface Science and Nanotechnology/17/pp.56-60, 2019 - Relationship between band-offset, gate leakage current, and interface states density at SiO2/4H-SiC (000-1) interface
Indari Efi Dwi; Yamashita Yoshiyuki; Hasunuma Ryu; Nag...
AIP ADVANCES/9(4), 2019-04 - Reliability factors of ultrathin dielectric films based on highly controlled SiO2 films
Hasunuma Ryu; Kawamura Hiroaki; Yamabe Kikuo
Jpn. J. Appl. Phys./57(6:::SI)/p.06KB05, 2018-06 - Direct Observation of the Energy Distribution of Interface States at SiO2/4H-SiC Interface: Operando Hard X-ray Photoelectron Spectroscopic Study
山下 良之; 蓮沼 隆; 長田 貴弘; 知京 豊祐
Hyomen Kagaku/38(7)/pp.347-350, 2017 - Energy distribution of interface states at SiO2/SiC interface obtained from operando photoelectron spectroscopy
山下 良之; 蓮沼 隆; 長田 貴弘; 知京 知京
Abstract of annual meeting of the Surface Science of Japan/36(0)/p.406, 2016 - Atomic Level Thickness Uniformity and Reliability of Ultrathin Silicon Dioxide Films Thermally Grown on Crystalline Silicon
山部 紀久夫; 蓮沼 隆
Shinku/58(1)/pp.27-34, 2015 - Nanoindentation Damage near Silicon Surface Embossed by Immersion in Ultralow-Dissolved-Oxygen Water
Yamabe Kikuo; Hasunuma Ryu; Kudo Shun; Kamata Katsuya
ECS Journal of Solid State Science and Technology/2(5)/pp.225-229, 2013-04 - Microscopic Thickness Uniformity and Time-Dependent Dielectric Breakdown Lifetime Dispersion of Thermally Grown Ultrathin SiO2 Film on Atomically Flat Si Surface
Hasunuma Ryu; Hayashi Yusuke; Ota Masahiro; Yamabe Kikuo
JAPANESE JOURNAL OF APPLIED PHYSICS/52(3), 2013-03 - Dielectric Degradation of Gate SiO2 Films by Cu Contamination Posterior to Poly Si Gate MOS Capacitor Fabrication
Takashi Onizawa; Keiichi Higuchi; Masakazu Goto; Norio...
Electrochemical Society, transaction/(2004-05)/p.317-325, 2004-01 - Oxidation of Silicon Utilizing a Microwave Plasma System: Electric-Stress Hardening of SiO2 Films by Controlling the Surface and Interface Roughness
Kabe Yoshiro; Hasunuma Ryu; Yamabe Kikuo
Jpn J Appl Phys/51(4)/pp.41104-041104-5, 2012-04 - Variation of Chemical Vapor Deposited SiO2 Density Due to Generation and Shrinkage of Open Space During Thermal Annealing
Sometani Mitsuru; Hasunuma Ryu; Ogino Masaaki; Kuribayash...
JAPANESE JOURNAL OF APPLIED PHYSICS/51(2)/pp.21101-021101-3, 2012-02 - Cathode Electron Injection Breakdown Model and Time Dependent Dielectric Breakdown Lifetime Prediction in High-/Metal Gate Stack p-Type Metal–Oxide–Silicon Field Effect Transistors
Sato Motoyuki; Tamura Chihiro; Yamabe Kikuo; Shiraishi K...
Jpn J Appl Phys/47(5)/pp.3326-3331, 2008-05 - Vestiges of Multiple Progressive Dielectric Breakdown on HfSiON Surfaces
Hayashi Tomohiro; Tamura Chihiro; Sato Motoyuki; Hasunuma...
Jpn J Appl Phys/48(5)/pp.05DD02-05DD02-3, 2009-05 - Selective Growth of Monoatomic Cu Rows at Step Edges on Si(111) Substrates in Ultralow-Dissolved-Oxygen Water
TOKUDA Norio; NISHIZAWA Masayasu; MIKI Kazushi; YAMASAKI Sat...
Japanese journal of applied physics. Pt. 2, Letters & express letters/44(16)/p.613, 2005-05 - Guiding Principle of Energy Level Controllability of Silicon Dangling Bond in HfSiON
UMEZAWA N.; SHIRAISHI K.; MIYAZAKI S.; UEDONO A.; AKASAKA...
Extended abstracts of the ... Conference on Solid State Devices and Materials/2006(0)/pp.460-461, 2006-09 - Cathode Electron Injection Breakdown Model and Time Dependent Dielectric Breakdown Lifetime Prediction in High-k / Metal Gate Stack pMOSFETs
佐藤 基之; 青山 敬幸; 奈良 安雄; 大路 譲; 蓮沼 隆; 山部 紀久夫; 白石 賢二; 宮崎 誠一; 山田...
電気学会研究会資料. EFM, 電子材料研究会/2008(1)/pp.7-12, 2008-05 - Nommiformity in ultrathin SiO2 on Si(111) characterized by conductive atomic force microscopy
Hasunuma R; Okamoto J; Tokuda N; Yamabe K
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS/43(11B)/pp.7861-7865, 2004-11 - more...
- Systematic Search for Stabilizing Dopants in ZrO2 and HfO2 Using First-Principles Calculations
- Books
- 走査型プローブ顕微鏡による原子操作および電気伝導特性解析に関する研究
蓮沼 隆
2001-03
- 走査型プローブ顕微鏡による原子操作および電気伝導特性解析に関する研究
- Conference, etc.
- Evaluation of Electron-Phonon Coupling Strength and Average Phonon Energies in MoS2 Thin Film
Umidakhon Rayimjonova Daisuki Kawai ; Hasunuma Ryu; ISL...
2024 International Conference on Solid State Devices and Materials (SSDM 2024)/2023-09-01 - SiC酸化膜界面の基礎物性解明に向けて
矢野 裕司; 岡本大; 梅田享英; 櫻井岳暁; 蓮沼隆
SIP「次世代パワーエレクトロニクス」公開シンポジウム/2019-03-28--2019-03-29 - Reliability factors of ultrathin dielectric films based on highly controlled SiO2 films
Hasunuma Ryu; Kawamura Hiroaki; Yamabe Kikuo
International Workshop on Dielectric Thin Films for Future Electron Devices - Science and Technology (IWDTF)/2017-11-20--2017-11-22 - Characterization of Interface State Density of SiO2/SiC(000-1) Based on Oxygen Concentration at the Interface during Thermal Oxidation
Hasunuma Ryu; Hanasato Kohei; Yamabe Kikuo
Symposium on Gallium Nitride and Silicon Carbide Power Technologies 6 held during the PRiME Joint International Meeting of The Electrochemical-Society, The Electrochemical-Society-of-Japan, and the Korean-Electrochemical-Society/2016-10-02--2016-10-07 - Interfacial Transitional Layer in SiO2 Film Thermally Grown on SiC(000-1)
Nagai Ryu; Iitsuka Nozomu; Ozawa Kodai; Hasunuma Ryu; ...
Symposium on Gallium Nitride and Silicon Carbide Power Technologies 6 held during the PRiME Joint International Meeting of The Electrochemical-Society, The Electrochemical-Society-of-Japan, and the Korean-Electrochemical-Society/2016-10-02--2016-10-07 - 熱酸化SiO2/SiC界面近傍の不均一層とそのリーク電流特性
Hasunuma Ryu
電子デバイス界面テクノロジー研究会2017/2017-01--2017-01 - SiC C 面上に乾燥酸素および水蒸気雰囲気で形成した熱酸化SiO2 膜密度
Hasunuma Ryu
電子デバイス界面テクノロジー研究会2017/2017-01--2017-01 - SiC上TEOS-SiO2の熱処理による絶縁特性の改善
Hasunuma Ryu
電子デバイス界面テクノロジー研究会2017/2017-01--2017-01 - 熱酸化SiO2/SiC界面遷移層の評価
Hasunuma Ryu
第77回応用物理学会秋季学術講演会/2016-09--2016-09 - SiC上wet酸化膜密度評価
Hasunuma Ryu
第75回応用物理学会秋季学術講演会/2016-09--2016-09 - SiC C 面上に水蒸気雰囲気で形成した熱酸化SiO2膜の
Hasunuma Ryu
第64回応用物理学会春季学術講演会/2017-03--2017-03 - SiC(000-1)のウェット酸化における界面酸化剤濃度
Hasunuma Ryu
第64回応用物理学会春季学術講演会/2017-03--2017-03 - SiC上TEOS-SiO2の熱処理による絶縁特性の改善
Hasunuma Ryu
第64回応用物理学会春季学術講演会/2017-03--2017-03 - Interfacial Transitional Layer in SiO2 Film Thermally Grown on SiC(000-1)
Hasunuma Ryu; Hanasato Kohei
PRiME 2016/2016-10-02--2016-10-07 - Characterization of Interface State Density of SiO2/SiC (000-1) Based on Oxygen Concentration
Hasunuma Ryu; Hanasato Kohei
PRiME 2016/2016-10-02--2016-10-07 - Direct Observation of Energy Distribution of Interface States at SiO2/4H-SiC Interface
Yamashita Y.; Hasunuma Ryu; Nagata T.; Chikyow T.
Symposium on Gallium Nitride and Silicon Carbide Power Technologies 6 held during the PRiME Joint International Meeting of The Electrochemical-Society, The Electrochemical-Society-of-Japan, and the Korean-Electrochemical-Society/2016-10-02--2016-10-07 - Nitrogen Concentration Dependence on Electrical Characteristics of HfSiON Dielectric Film
蓮沼 隆; 内藤 達也; 犬宮 誠治; 山部 紀久夫
電子情報通信学会技術研究報告 - Reversible and Irreversible Degradation Attributing to Oxygen Vacancy in HfSiON Gate Films during Electrical Stress Application
Hasunuma Ryu; Tamura Chihiro; Nomura Tsuyoshi; Kikuchi Yuuki...
IEDM - Development of a Novel System for Characterizing MOSFET Noise in Higher Frequency Regimes
Ohmori Kenji; Hasunuma Ryu; Yamada Keisaku
IEEE International Conference on Microelectronic Test Structures (ICMTS)/2012-03-20--2012-03-22 - Generation and Growth of Atomic-scale Roughness at Surface and Interface of Silicon Dioxide Thermally Grown on Atomically Flat Si Surface
Hayashi Yuusuke; Hasunuma Ryu; Yamabe Kikuo
International Symposium on Technology Evolution for Silicon Nano-Electronics/2010-06-03--2010-06-05 - Comprehensive analysis of positive and negative bias temperature instabilities in high-k/metal gate stack metal-oxide-silicon field effect transistors with equivalent oxide thickness scaling to sub-1 nm
Sato Motoyuki; Yamabe Kikuo; Shiraishi Kenji; Miyazaki S...
International Conference on Solid State Devices and Materials - Trap-Related Carrier Transports in p-Channel Field-Effect Transistor with Polycrystalline Si/HSiON Gate Stack
Chen Jun; Sekiguchi Takashi; Fukata Naoki; Takase Masami...
International Conference on Solid State Devices and Materials - Analyses of Threshold Voltage Shift on Hole Injection in HfSiOx Films
Tamura Chihiro; Hayashi Tomohiro; Kikuchi Yuuki; Ohmori ...
International Workshop on Dielectric Thin Films for Future ULSI Devices - Vestiges of Multiple Progressive Dielectric Breakdown on HfSiON Surfaces
Hayashi Tomohiro; Tamura Chihiro; Sato Motoyuki; Hasunuma...
International Workshop on Dielectric Thin Films for Future ULSI Devices - Improvement of Dielectric Properties on Deposited SiO2 Caused by Stress Relaxation with Thermal Annealing
Sometani Mitsuru; Hasunuma Ryu; Ogino Masaaki; Kuribayash...
International Workshop on Dielectric Thin Films for Future ULSI Devices - more...
- Evaluation of Electron-Phonon Coupling Strength and Average Phonon Energies in MoS2 Thin Film
- Teaching
2024-10 -- 2025-02 Science and Technology Seminar III University of Tsukuba. 2024-04 -- 2024-08 Science and Technology Seminar III University of Tsukuba. 2024-10 -- 2025-02 Research in Nano-Science and Nano-Technology IIA University of Tsukuba. 2024-04 -- 2024-08 Research in Nano-Science and Nano-Technology IIIB University of Tsukuba. 2024-04 -- 2024-08 Research in Nano-Science and Nano-Technology IA University of Tsukuba. 2024-10 -- 2025-02 Research in Nano-Science and Nano-Technology IB University of Tsukuba. 2024-10 -- 2025-02 Seminar under Industry-University Collaboration III University of Tsukuba. 2024-04 -- 2024-08 Seminar under Industry-University Collaboration III University of Tsukuba. 2024-10 -- 2025-02 Research in Nano-Science and Nano-Technology IA University of Tsukuba. 2024-10 -- 2025-02 Research in Applied Physics IVA University of Tsukuba. more... - Professional activities
2012-04 -- (current) 応用物理学会シリコンテクノロジー分科会 幹事 2006-04 -- (current) 電子デバイス界面テクノロジー研究会 プログラム委員 2010-04 -- (current) International Microprocesses and Nanotechnology Conference 論文委員
(Last updated: 2023-05-08)