MAKIMURA Tetsuya
- Conference, etc.
- レーザープラズマ軟X線による透明材料の微細加工法の探索
鳥居 周一; 牧村 哲也; 新納 弘之; 高橋 昭彦; 岡崎 功太; 秋山智哉; 中村 大輔; 岡田 龍雄; 村上 浩一
__OQD-09-42__49-53/2009 - Responses of polymers to laser plasma EUV light beyond ablation threshold and micromachining
Makimura Tetsuya; Torii Shuichi; Okazaki Kota; Nakamura ...
Conference on Damage to VUV, EUV, and X-ray Optics III/2011-04-18--2011-04-20 - Ablation of inorganic materials using laser plasma soft X-rays
Makimura Tetsuya; Fujimori Takashige; Uchida Satoshi; Mur...
Conference on Damage to VUV, EUV and X-Ray Optics - 1.5 mu m light emission of Er 31 ions doped in SiO2 films including Si nanocrystallites and in SiOx films
Makimura Tetsuya; Uematsu Hiroshi; Okada Yuuki; Murakami ...
8th International Conference on Laser Ablation - Direct nanomachining of inorganic transparent materials using laser plasma soft x-rays
Makimura Tetsuya; Miyamoto Hisao; Uchida Satoshi; Niino ...
8th International Conference on Laser Ablation - Ablation process of silica glass induced by laser plasma soft X-ray irradiation
Torii Shuichi; Fujimori Takashige; Makimura Tetsuya; Niin...
6th International Conference on Photo-Excited Processes and Applications - Nano- and micromachining of transparent materials using laser plasma soft X-Rays
Makimura Tetsuya; Torii Shuichi; Niino Hiroyuki; Murakami...
8th Pacific Rim Conference on Lasers and Electro-Optics - Ablation of silica glass using pulsed laser plasma soft X-rays
Makimura T; Kenmotsu Y; Miyamoto H; Niino H; Murakami K
10th International Workshop on Desorption Induced by Elebtronic Transitions - Nano-ablation of inorganic materials using laser plasma soft X-rays at around 10nm
Makimura Tetsuya; Miyamoto Hisao; Uchida Satoshi; Fujimor...
18th International Microprocesses and Nantechnology Conference
- レーザープラズマ軟X線による透明材料の微細加工法の探索