MAKIMURA Tetsuya
- Articles
- Deveopment of Detection Method and Formation Process of as-Suspended Si Nanoparticles
牧村 哲也
The Papers of Technical Meeting on Optical and Quantum Devices, IEE Japan/OQD-03-11,/p./1-4, 2003-01 - Optical excitation of Er iions with 1.5 micro m luminescence via the luminescent state in Si nanocrystallites embedded in SiO2 matrices
Tetsuya Makimura; Keiichi Kondo; Hiroshi Uematsu; Changqi...
Applied Physics Letters/83/p.5422-5424, 2003-01 - Nanomachining of inorganic transparent materials using an X-ray exciton method
Tetsuya Makimura; Youichi Kenmotsu; Hisao Miyamoto; Michi...
Proceedings of SPIE/5662/p.107-112, 2004-01 - Quartz micromachining using laser plasma soft X-rays and ultraviolet laser light
牧村 哲也; 村上 浩一(
Applied Physcis Letters/85/p.1274-1276, 2004-01 - Excitation of Er atoms by energy transfer from Si nanocrystallites embedded in SiO2 matrices fabricated by laser ablation
牧村 哲也
Applied Physics A/79/p.799-801, 2004-01 - Ablation of silica glass using laser plasma soft X-rays at around 10 nm and ablation dynamics
Tetsuya Makimura; Hisao Miyamoto; Satohsi Uchida; Hiro...
Materials Processing for Properties and Performance/4/p.267-269, 2005-01 - Nanomachining of quartz glass plates using pulsed laser plasma soft X-rays
Satoshi Uchida; Tetsuya Makimura; Hisao Miyamoto; Hiroyuk...
Materials Processing for Properties and Performance/4/p.261-263, 2005-01 - Ablation of inorganic materials using laser plasma soft X-rays
Hisao Miyamoto; Tetsuya Makimura; Satoshi Uchida; Hisa...
Materials Processing for Properties and Performance/4/p.261-263, 2005-01 - Direct micromachining of quratz glass plates using pulsed lsaer plasma soft x-rays
Tetsuya Makimura; Hisao Miyamoto; Youichi Kenmotsu; Kouic...
Applied Physics Letters/86/p.103111-1 --- 103111-3, 2005-01 - レーザープラズマ軟X線によるシリカガラスの極微細加工
牧村哲也; 内田智; 藤森隆成; 新納弘之; 村上浩一
レーザー学会第３５２回研究会報告/RTM-06/p.53-56, 2006-01 - Direct micromachining of inorganic transparent materials using pulsed laser plasma soft X-rays
Tetsuya Makimura; Hisao Miyamoto; Satohsi Uchida; Hiroyuk...
Conference proceeding series of Institute of Pure and Applied Physics, 2006-01 - レーザープラズマ軟X線による無機透明材料の微細加工
牧村哲也; 村上浩一
セラミックス/42/p.64, 2007-01 - Ablation of inorganic materials using laser plasma soft X-rays
Tetsuya Makimura; Takashige Fujimori; Satoshi Uchida; Hir...
Proceedings of SPIE/6886/p.6586089 1-15, 2007-01 - 1.5 micrometer light emission of Er3+ ions in SiO2 films including Si nanocrystallites and in SiOx films
Tetsuya Makimura; Hiroshi Uematsu; Yuuki Okada; Kouichi Mura...
Journal of Physics, 2007-01 - Direct nanomachining of inorganic transparent materials using laser plasma soft X-rays
Tetsuya Makimura; Hisao Miyamoto; Satohsi Uchida; Hiroyuk...
Journal of Physics, 2007-01 - X線ナノ加工
牧村哲也; 新納弘之; 村上浩一
オプトニューズ/3(1)/p.23-26, 2009-01 - レーザー生成EUV光によるシリカガラスのアブレーション
鳥居 周一; 牧村 哲也; 新納 弘之; 村上 浩一
レーザー学会第394回研究会報告/RTM-09-42/p.27-32, 2009-01 - Silica nano-ablation using laser plasma soft X-rays
Tetsuya Makimura; Shuichi Torii; Hiroyuki Niino; Kouichi ...
Proceedings of SPIE/7361, 2009-01 - Nano- and micromachining using laser plasma soft X-rays
Tetsuya Makimura; Shuichi Torii; Hiroyuki Niino; Kouichi ...
Journal of Nanophotonics/4/p.040305, 2010-01 - Micromachining of silica glass using EUV radiation of laser-produced plasma
A. Takahashi; S. Torii; T. Makimura; K. Murakami; K. Oka...
IEEJ Trans. EIS/130(10)/p.1779-1783, 2010-01 - Micromachining of Polymethylmethacrylate and Polydimethylsiloxane Using Laser Plasma Soft X-rays
S. Torii; K. Okazaki; D. Nakamura; T. Makimura; T. Okdad...
Journal of Laser Micro/Nanoengineering/6/p.235-238, 2011-01 - Silica ablation process induced by focused laser plasma soft x-rays
Tetsuya Makimura; Shuichi Torii; Hiroyuki Niino; Kouichi ...
Proceedings of SPIE/8206, 2012-01 - レーザーアブレーション法による可視発光シリコン超微粒子の作成
牧村 哲也; 國井 康彦; 村上 浩一
電気学会研究会資料. OQD, 光・量子デバイス研究会/1996(1)/pp.17-26, 1996-03 - レ-ザ-アブレ-ション法による可視発光シリコン超微粒子の作成
牧村 哲也; 国井 康彦; 村上 浩一
表面/34(8)/pp.467-473, 1996-08 - Dynamical Mechanism of Laser Ablation and Synthesis of Nanoclusters
村上 浩一; 牧村 哲也; 依田 修; 宮下 敦巳
The Review of laser engineering/24(9)/pp.963-970, 1996-09 - more...
- Deveopment of Detection Method and Formation Process of as-Suspended Si Nanoparticles