MAKIMURA Tetsuya
- Articles
- Direct micromachining of transparent materials using EUV radiation from laser produced plasma
高橋 昭彦; 岡崎 功太; 中村 大輔; 岡田 龍雄; 鳥居 周一; 牧村 哲也; 村上 浩一; 新納 弘之
電気学会研究会資料. OQD, 光・量子デバイス研究会/2009(42)/pp.19-22, 2009-05 - Study on Non-Thermal Ablation Process of Silica Glass Using Laser Plasma Soft X-rays toward Nanomachining
鳥居 周一; 藤森 隆成; 牧村 哲也; 新納 弘之; 村上 浩一
IEEJ Transactions on Electronics, Information and Systems/129(7)/pp.1186-1191, 2009-07 - Micromachining by Laser Plasma Soft X-ray Ablation
牧村 哲也; 鳥居 周一; 新納 弘之; 村上 浩一
Journal of The Surface Finishing Society of Japan/60(11)/pp.687-692, 2009-11 - Micromachining of SiO_2 by near-field ablation using 10.6μm TEA CO_2 laser
岡崎 功太; 鳥居 周一; 牧村 哲也; 新納 弘之; 村上 浩一; 中村 大輔; 高橋 昭彦; 岡田 龍雄
レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan/395(0)/pp.23-28, 2009-12 - Ablation of Silica Glass using EUV radiation from Laser Produced Plasma
鳥居 周一; 牧村 哲也; 新納 弘之; 村上 浩一
レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan/394(0)/pp.27-32, 2009-12 - Micromachining of Silica Glass Using EUV Radiation of Laser-Produced Plasma
Takahashi Akihiko; Torii Shuichi; Makimura Tetsuya; Murak...
IEEJ Transactions on Electronics, Information and Systems/130(10)/pp.1779-1783, 2010-10 - Micromachining of Inorganic Materials Using Plasma Soft X-Rays
Makimura Tetsuya; Uchida Satoshi; Fujimori Takashige; Nii...
ELECTRONICS AND COMMUNICATIONS IN JAPAN/91(4)/pp.45-51, 2009-04 - Ablation process of silica glass induced by laser plasma soft X-ray irradiation
Torii Shuichi; Fujimori Takashige; Makimura Tetsuya; Niin...
APPLIED SURFACE SCIENCE/255(24)/pp.9840-9842, 2009-09 - Direct Etching of Poly(methyl methacrylate) Using Laser Plasma Soft X-rays
Torii Shuichi; Makimura Tetsuya; Okazaki Kouta; Nakamura ...
APPLIED PHYSICS EXPRESS/3(6)/pp.0-0, 2010-06 - Optical excitation of Er ions with 1.5 mu m luminescence via the luminescent state in Si nanocrystallites embedded in SiO2 matrices
Makimura T; Kondo K; Uematsu H; Li C; Murakami K
APPLIED PHYSICS LETTERS/83(26)/pp.5422-5424, 2003-12 - In situ size measurement of Si nanoparticles and formation dynamics after laser ablation
Makimura T; Mizuta T; Takahashi T; Murakami K
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING/79(4-6)/pp.819-821, 2004-09 - Excitation of Er atoms by energy transfer from Si nanocrystallites embedded in SiO2 matrices fabricated by laser ablation
Makimura T; Uematsu H; Kondo K; Li C; Murakami K
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING/79(4-6)/pp.799-801, 2004-09 - Direct micromachining of quartz glass plates using pulsed laser plasma soft x-rays
Makimura T; Miyamoto H; Kenmotsu Y; Murakami K; Niino H
APPLIED PHYSICS LETTERS/86(10)/pp.0-0, 2005-03 - Ablation of silica glass using pulsed laser plasma soft X-rays
Makimura T; Kenmotsu Y; Miyamoto H; Niino H; Murakami K
SURFACE SCIENCE/593(1-3)/pp.248-251, 2005-11 - Nano-ablation of inorganic materials using laser plasma soft X-rays at around 10nm
Makimura Tetsuya; Miyamoto Hisao; Uchida Satoshi; Fujimor...
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS/45(6B)/pp.5545-5547, 2006-06
- Direct micromachining of transparent materials using EUV radiation from laser produced plasma