Nonaka Hidehiko
- Articles
- In-situ measurement of gas composition changes in radio frequency plasmas using a quartz sensor
Suzuki Atsushi; Nonaka Hidehiko
Review of Scientific Instruments/80(9)/pp.95109-1-95109-1, 2009-09 - Advantage of highly concentrated (>90%) ozone for chemical vapor deposition SiO2 grown under 200℃ using hexamethyldisilazane and ultraviolet light excited ozone
Kameda Naoto; Nishiguchi Tetsuya; Morikawa Yoshiki; Kekur...
Japanese Journal of Applied Physics/48(5)/pp.05DB01-1-05DB01-4, 2009-03 - Factorial analysis of cluster-SIMS depth profiling using metal-cluster-complex ion beams
Fujiwara Yukio; Kondou Kouji; Watanabe Kouoji; Nonaka Hi...
Applied Surface Science/255(4)/pp.1338-1340, 2008-12 - Cluster SIMS using metal cluster complex ions
Fujiwara Yukio; Kondou Kouji; Teranishi Yoshikazu; Watana...
Applied Surface Science/255(4)/pp.916-921, 2008-12 - Measurement of a wide range of hydrogen concentration with rapid response using dual pressure gauges
Suzuki Atsushi; Nonaka Hidehiko
International Journal of Hydrogen Energy/33(21)/pp.6385-6392, 2008-11 - Non-Destructive and Discriminating Identification of Illegal Drugs by Transient Absorption Spectroscopy in the Visible and Near-IR Wavelength Range
Sato Chie; Furube Akihiro; Katoh Ryuzi; Nonaka Hidehiko; ...
Japanese Journal of Applied Physics/47(11)/pp.8583-8589, 2008-11 - Photochemical Reaction of Ozone and 1,1,1,3,3,3-Hexamethyldisilazane: Analysis of the Gas Reaction between Precursors in a Photochemical Vapor Deposition Process
Nakamura Ken; Nonaka Hidehiko; Kameda Naoto; Nishiguchi ...
Japanese Journal of Applied Physics/47(9)/pp.7349-7355, 2008-09 - Multiphoton ionization of metal cluster complexes Os3(CO)12 and Ir4(CO)12: Determination of the ionization energy and coordination energy of the complex ions
Nakanaga Taisuke; Nagai Hidekazu; Suzuki Atsushi; Fujiwar...
Journal of Photochemistry and Photobiology A-Chemistry/197(2/3)/pp.266-272, 2008-06 - Measured Gas Concentrations and Flow Properties in SiH4 - H2 Mixtures
Suzuki Atsushi; Nonaka Hidehiko
Japanese Journal of Applied Physics/47(5)/pp.3661-3665, 2008-05 - Dissociative ionization of a large molecule studied by intense phase-controlled laser fields
Ohmura Hideki; Saito Naoaki; Nonaka Hidehiko; Ichimura S...
Physical Review A/77(5)/pp.053405-1-053405-5, 2008-05 - HOPG surface irradiated by metal cluster complex ions
Teranishi Yoshikazu; Kondou Kouji; Mizota Takeshi; Fujiwa...
Materials Science And Engineering B/148/pp.132-135, 2008-02 - Secondary-Ion-Mass-Spectrometry Depth Profiling of Ultra-Shallow Boron Delta Layers in Silicon with the Massive Molecular Ion Beam of Ir4(CO)7+
Fujiwara Yukio; Kondou Kouji; Watanabe Kouoji; Nonaka Hi...
Japanese Journal of Applied Physics/46(11)/pp.7599-7601, 2007-11 - Characteristics of altered layers formed by sputtering with cluster ions containing diverse elements with large mass differences
Fujiwara Yukio; Kondou Kouji; Nonaka Hidehiko; Saito Nao...
Journal of Applied Physics/102(7)/pp.73509-1-73509-7, 2007-11 - Beam-induced nanoscale ripple formation on silicon with the metal-cluster-complex ion of Ir4(CO)7+
Fujiwara Yukio; Kondou Kouji; Watanabe Kouji; Nonaka Hid...
Japanese Journal of Applied Physics/46(35)/pp.L854-L857, 2007-09 - High quality gate dielectric film on poly-silicon at room temperature by UV light excited ozone
Kameda Naoto; Nishiguchi Tetsuya; Morikawa Yoshiki; Kekur...
Journal of the Electrochemical Society/154(9)/pp.H769-H772, 2007-09 - Observation of a sputtered Si surface by an ion irradiation system using a proto-type compact cluster ion source
Teranishi Yoshikazu; Kondou Kouji; Mizota Takeshi; Fujiwa...
Surface and Coatings Technology/201(19/20)/pp.8641-8645, 2007-08 - Rapid Oxidation of Silicon Using UV-Light Irradiation in Low-Pressure, Highly Concentrated Ozone Gas below 300 ℃
Nishiguchi Tetsuya; Saitoh Shigeru; Kameda Naoto; Morikaw...
Japanese Journal of Applied Physics/46(5A)/pp.2835-2839, 2007-05 - Irradiation characteristics of metal-cluster-complex ions containing diverse multi-elements with large mass differences
Fujiwara Yukio; Kondou Kouji; Teranishi Yoshikazu; Nonaka...
Nuclear Instruments and Methods in Physics Research Section B/257/pp.653-657, 2007-04 - Sputtered Si surface irradiated by metal cluster complex ions such as Os3(CO)12 and Ir4(CO)12
Teranishi Yoshikazu; Kondou Kouji; Fujiwara Yukio; Nonaka...
Nuclear Instruments and Methods in Physics Research Section B/257/pp.670-676, 2007-04 - SIMS depth profile study using of metal cluster complex ion bombardment
Tomita Mitsuhiro; Kinno Teruyuki; Koike Mitsuo; Tanaka H...
Nuclear Instruments and Methods in Physics Research Section B/258/pp.242-245, 2007-04 - Reaction analysis of initial oxidation of silicon by UV-light-excited ozone and the application to rapid and uniform SiO2 film growth
Tosaka Aki; Nishiguchi Tetsuya; Nonaka Hidehiko; Ichimura...
Journal of Applied Physics/101(3)/pp.034909-1-034909-7, 2007-02 - Characteristics of a metal-cluster-complex ion beam of Os3(CO)n+ (n=7 or 8) for low damage sputtering
Fujiwara Yukio; Kondou Kouji; Teranishi Yoshikazu; Nonaka...
Surface and Interface Analysis/38(12/13)/pp.1539-1544, 2006-12 - Secondary Ion Mass Spectrometry of organic thin films using a metal-cluster- complex ion source
Fujiwara Yukio; Kondou Kouji; Nonaka Hidehiko; Saito Nao...
Japanese Journal of Applied Physics/45(36B)/pp.L987-L990, 2006-09 - Ion-beam characteristics of the metal cluster complex of Ir4(CO)12
Fujiwara Yukio; Kondou Kouji; Teranishi Yoshikazu; Nonaka...
Journal of Applied Physics/100(4)/pp.043305-1-043305-9, 2006-08 - Depth Resolution Improvement in Secondary Ion Mass Spectrometry Analysis using Metal Cluster Complex Ion Bombardment
Tomita Mitsuhiro; Kinno Teruyuki; Koike Mitsuo; Tanaka H...
Applied Physics Letters/89(5)/pp.053123-1-053123-3, 2006-07 - more...
- In-situ measurement of gas composition changes in radio frequency plasmas using a quartz sensor