MURAKAMI Kouichi

Affiliation
University of Tsukuba
Official title
Professor Emeritus
URL
Phone
029-853-5272
Fax
029-853-5272
Research fields
Optical engineering, Photon science
Applied materials
Research keywords
Semiconductors
Impurities
Defects
Hydrogen Passivation
Laser Ablation
Time-resolved Structure Measurements
Laser-Plasma Soft X-rays Spectroscopy/Nano-Processing
Si-Nanoscience
Si-Nanowires
Si-Nanocrystals
Research projects
NEDO提案公募型最先端分野研究開発事業 「電子励起によるs-pエンジニアリング　－Ｂ班　双安定性を示す不純物系の探索と応用ー　に関する研究開発」1995-11 -- 1997-03村上浩一ＮＥＤＯ/その他44,500,000Yen
New Time-Resolued Laser-Plasma Pulse Soft-X Ray Spectroscopy -Development and Application- -- (current)/
Study on Light-Element Impurities(H, N, O) in Silicon : Hydrogen Passivation and Hydrogen Molecules -- (current)/
ナノ結晶、ナノワイヤへの機能性不純物ドーピングと新物性2009 -- 2011Japan Society of for the Promotion of Science/基盤研究(C)4,550,000Yen
シリコン中の水素の精密制御と薄膜トランジスターへの応用2001 -- (current)Japan Society of for the Promotion of Science/基盤研究(B)12,800,000Yen
半導体結晶中の水素分子の制御と分子メモリー1999 -- (current)Japan Society of for the Promotion of Science/萌芽的研究2,000,000Yen
光デバイスとしてサイズ選択したシリコンナノ微粒子薄膜のパルスレーザーを用いた堆積1998 -- (current)Japan Society of for the Promotion of Science/特別研究員奨励費1,200,000Yen
レーザーアブレーションによる半導体薄膜作製と時間分解構造測定1998 -- (current)Japan Society of for the Promotion of Science/国際学術研究18,500,000Yen
時間分解測定によるシリコンクラスターの表面反応と光ルミネッセンス1997 -- (current)Japan Society of for the Promotion of Science/重点領域研究1,600,000Yen
レーザーアブレーションによるIV族超微粒子形成と動的機構の時間分解分光測定1996 -- (current)Japan Society of for the Promotion of Science/基盤研究(B)900,000Yen
more...
Academic background
-- 1970Osaka University Faculty of Engineering Science 電気工学
-- 1975Osaka University Graduate School, Division of Engineering Science 電気工学
Degree
工学博士
Academic societies
-- (current)The Laser Society of Japan
-- (current)The Japan Society of Applied Physics
-- (current)THE PHYSICAL SOCIETY OF JAPAN
Articles
  • ESR and Electrical Properties of Ion Implanted Layer in Semiconductors
    S. Namba; K. Masuda; K. Gamo; S. Ohba; K. Murakami
    Proc. Intern. Conf. on Physics and Chemistry of Semiconductors/p.179-182, 1971
  • Optical Absorption Bands of the Radical in Irradiated Anthracene Single Crystals
    Y. Akasaka; K. Murakami; K. Masuda; S. Namba
    Molecular Crystals and Liquid Crystals/13/p.377-380, 1971
  • Optical Absorption Measurements of α-Hydronaphthl Radical Produced by Electron Beam Irradiation and Hydrogen Atom Bombardment
    Y. Akasaka; K. Murakami; K. Masuda; S. Namba
    Molecular Crystals and Liquid Crystals/13/p.37-47, 1971
  • ESR Studies on the Defect Produced by Ion Implantation
    K. Masuda; S. Namba; K. Gamo; K. Murakami
    Proc. U.S.-Japan Seminor on Ion Implantation in Semiconductors (Japan Soc. Promotion)/p.19-26, 1972
  • ESR Studies on Defects and Amorphous Phase in Silicon Produced by Ion Implantation
    K. Murakami; K. Masuda; K. Gamo; S. Namba
    Jpn. J. Appl. Phys./12/p.1307-1316, 1973
  • ESR Studies on Annealing Behavior of Heavily Damaged Silicon
    K. Murakami; K. Masuda; K. Gamo; S. Namba
    Proc.4th Intern. Conf. on Ion Implantation in Semiconductors and Other Materials (Plenum Press, 1975)/p.533-538, 1975
  • Electron Spin Resonance of Ion-Implanted Si:P System
    K. Murakami; K. Masuda; and S. Namba
    Solid State Commun./18/p.663-666, 1976
  • Effects of Ion-Implanted Atoms upon Conduction Electron Spin Resonance (CESR) in a Si:P System
    K. Murakami; K. Masuda; K. Gamo; S. Namba
    Appl. Phys. Lett./30/p.300-302, 1977
  • Electron Spin Resonance Study of Interacting Donor Clusters in Phosphorus -Doped Silicon at Low Temperatures -I. Shift of ESR Line at 0.56 - 4.2 K
    Y. Toyota; N. Kishimoto; K. Murakami; K. Morigaki
    J. Phys. Soc. Japan/43114-117, 1977
  • Electron Spin Resonance in the Amorphous Si-Au System
    N. Kishimoto; K. Morigaki; K. Murakami; A. Shimizu; A. H...
    phys. stat. sol. (b)/80/p.K113-115, 1977
  • Resistance Changes Induced by Electron Spin Resonance in Ion-Implanted Si:P System
    K. Murakami; S. Namba; N. Kishimoto; K. Masuda; K. Gamo
    J. Appl. Phys./49/p.2402-2406, 1978
  • Dynamic Behaviors of Pulsed-Laser Annealing in Ion-Implanted Silicon Studied by Measuring the Optical Reflectance
    村上 浩一
    AIP Conf. Proc./50/p.61-66, 1979
  • Dynamic Behaviors of Pulsed-Laser Annealing in Ion-Implanted Silicon Studied by Measuring the Optical Reflectance
    K. Murakami; K. Gamo; S. Namba; M. Kawabe; Y. Aoyagi; Y. ...
    Proc. MRS Meeting on Laser-Solid Interactions and Laser Processing, AIP Conf. Proc./50/p.61-66, 1979
  • Laser Annealing of Te Ion Implanted GaAs
    K. Gamo; F. Katano; Y. Yuba; K. Murakami; S. Namba
    Proc. MRS Meeting on Laser-Solid Interactions and Laser Processing, AIP Conf. Proc./50/p.591-596, 1979
  • Influence of Spin Density in Ion Implanted Si Layers on Pulsed-Laser Annealing
    K. Murakami; E. Ikawa; K. Gamo; S. Namba; Y. Akasaka; Y. ...
    Appl. Phys. Lett./35/p.413-415, 1979
  • Dynamic Behavior of Mode-locked Nd:YAG Laser Annealing in Ion-Implanted Si, GaAs and GaP
    K. Murakami; K. Gamo; M. Kawabe S. Namba; and Y. Aoyagi
    Appl. Phys. Lett./35/p.628-630, 1979
  • Dynamic Behavior of 30-ps Pulsed Laser Annealing in Ion Implanted Si
    K. Murakami; K. Gamo; M. Kawabe S. Namba; and Y. Aoyagi
    Jpn. J. Appl. Phys./18/p.2331-2332, 1979
  • Laser-Irradiation Effects on Uncapsulated GaAs Studied by Capacitance Spectroscopy
    Y. Yuba; K. Gamo; K. Murakami; S. Namba
    Appl. Phys. Lett./35/p.156-158, 1979
  • Zeeman Energy Transfer at the Surface Layer of P Ion-Implanted Silicon
    K. Murakami; S. Namba; K. Gamo; K. Masuda
    Surface Sci./86/p.655-664, 1979
  • Dynamic Behavior of Pulsed-Laser Annealing in Ion-Implanted Silicon
    K. Murakami; M. Kawabe; K. Gamo; S. Namba; Y. Aoyagi
    Phys. Lett./70A/p.332-334, 1979
  • イオン注入Ｓｉのパルス・レ－ザ－・アニ－ル 　　　　　　－注入不純物とスピン密度依存性－
    村上浩一; 井川英治; Ａ．Ｈ．Ｏｒａｂｙ; 蒲生健次; 難波進; 増田康博
    レ－ザ－研究/7/p.152-160, 1979
  • Influence of Spin Density in Ion Implanted Si on Pulsed-Laser Annealing Effect
    K. Murakami; E. Ikawa; K. Gamo; S. Namba; Y. Akasaka; Y. ...
    Proc. Symp. on Laser and Electron Beam Processing of Electronic Materials (Electrochemical Society, Proc.80-1, 1980)/80-1/p.395-404, 1980
  • Dynamic Behavior of 30-ps Pulsed Laser Annealing in Ion Implanted Si
    K. Murakami; K. Gamo; S. Namba; M. Kawabe; Y. Aoyagi
    Proc. MRS Symp. on Laser and Electron Beam Processing of Materials (Academic Press, 1980)/p.162-167, 1980
  • Laser Annealing Effects in Ion-Implanted GaAs
    K. Gamo; Y. Yuba; A.H. Oraby; K. Murakami; S. Namba; Y. ...
    Proc. MRS Symp. on Laser and Electron Beam Processing of Materials (Academic Press, 1980)/p.322-327, 1980
  • Electrical Properties of Laser-Annealed Glow-Discharge Amorphous Silicon Layer
    Y.K. Koh; H. Okamoto; K. Murakami; K. Gamo; Y. Hamakawa; ...
    Jpn. J. Appl. Phys./19/p.849-853, 1980
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Books
  • Semiconductor Processes Probed by Ultrafast Spectroscopy, edited by R.R. Alfano
    K. Murakami; K. Masuda
    Academic Press, 1984
  • 機能薄膜プロセス技術集成(南日康夫、相沢益男編）
    村上浩一; 升田公三
    リアライズ社, 1986
  • 半導体計測評価事典
    村上浩一ほか; +村上 浩一
    サイエンスフォーラム, 1994
  • 結晶成長ハンドブック
    村上浩一ほか; +村上 浩一
    共立出版, 1995
  • Mesoscopic Materials and Clusters - Their Physical and Chemical Properties” edited by T. Arai et al.
    K. Murakami; A. Miyashita; and O. Yoda
    Kodansha-Springer, 1999
  • レーザーアブレーションとその応用
    村上浩一ほか; +村上 浩一
    コロナ社, 1999
  • ナノ材料科学 (横山浩編）
    村上浩一ほか; +村上 浩一
    オーム社, 2004
  • 科学大辞典
    国際科学振興財団編; +村上 浩一
    丸善, 2005
  • 表面物性工学ハンドブック (小間篤ほか編)
    村上浩一ほか; +村上 浩一
    丸善, 2007
  • Responses of polymers to laser plasma EUV light beyond ablation threshold and micromachining
    Makimura Tetsuya; Torii Shuichi; Okazaki Kota; Nakamura ...
    DAMAGE TO VUV, EUV, AND X-RAY OPTICS III/SPIE-INT SOC OPTICAL ENGINEERING, 2011-01
  • 1.5 mu m light emission of Er 31 ions doped in SiO2 films including Si nanocrystallites and in SiOx films
    Makimura Tetsuya; Uematsu Hiroshi; Okada Yuuki; Murakami ...
    COLA'05: 8th International Conference on Laser Ablation/IOP PUBLISHING LTD/pp.466-469, 2007-01
  • Nano- and micromachining of transparent materials using laser plasma soft X-Rays
    Makimura Tetsuya; Torii Shuichi; Niino Hiroyuki; Murakami...
    2009 LASERS & ELECTRO-OPTICS & THE PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS, VOLS 1 AND 2/IEEE/pp.466-467, 2009-01
  • Micromachining of inorganic transparent materials using pulsed laser plasma soft X-rays at 10 nm
    Makimura T; Kenmotsu Y; Miyamoto H; Uchida S; Niino H; Mu...
    Photon Processing in Microelectronics and Photonics IV/SPIE-INT SOC OPTICAL ENGINEERING/pp.9-20, 2005-01
Conference, etc.
  • Dynamics of Si Laser Ablation and Fabrication of Mesoscopic Particles
    K.Murakami
    ____
  • Responses of polymers to laser plasma EUV light beyond ablation threshold and micromachining
    Makimura Tetsuya; Torii Shuichi; Okazaki Kota; Nakamura ...
    Conference on Damage to VUV, EUV, and X-ray Optics III/2011-04-18--2011-04-20
  • Ablation process of silica glass induced by laser plasma soft X-ray irradiation
    Torii Shuichi; Fujimori Takashige; Makimura Tetsuya; Niin...
    6th International Conference on Photo-Excited Processes and Applications
  • Nano- and micromachining of transparent materials using laser plasma soft X-Rays
    Makimura Tetsuya; Torii Shuichi; Niino Hiroyuki; Murakami...
    8th Pacific Rim Conference on Lasers and Electro-Optics
  • Ablation of silica glass using pulsed laser plasma soft X-rays
    Makimura T; Kenmotsu Y; Miyamoto H; Niino H; Murakami K
    10th International Workshop on Desorption Induced by Elebtronic Transitions
Teaching
2011-04 -- 2011-07Nanotechnology career-enhancing tele-lectureUniversity of Tsukuba.
2011-04 -- 2012-03Research in Applied Physics IIUniversity of Tsukuba.
2011-04 -- 2012-03Research in Applied Physics IUniversity of Tsukuba.
2011-04 -- 2012-03Frontier Research in Nano-Science and Technology IVUniversity of Tsukuba.
2011-04 -- 2012-03Frontier Research in Nano-Science and Technology IIIUniversity of Tsukuba.
2011-08 -- 2012-03Physics of SemiconductorsUniversity of Tsukuba.
2011-08 -- 2012-03ULSI System TechnologyUniversity of Tsukuba.
2010-04 -- 2010-07Nanotechnology career-enhancing tele-lectureUniversity of Tsukuba.
2010-04 -- 2011-03Research in Applied Physics VUniversity of Tsukuba.
2010-04 -- 2011-03Research in Applied Physics IVUniversity of Tsukuba.
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Talks
  • Electronic States of P Donors in Si nanocrystals embedded in SiO2 studied by Electron Spin Resonance and photoluminescence - Hydrogen Passivation Effects –
    K. Murakami
    ECS Pacific Rim Meeting (PRIME)/2007-04-01
  • Ablation of inorganic materials using laser plasma soft X-rays
    T. Makimura; T. Fujimori; S. Uchida; ; Hiroyuki Niino; Kou...
    Optics and Opto-electronics/2007-04-01
  • レーザーアブレーションのダイオナミクス
    村上浩一; 大柳孝純; 依田修; 宮下敦巳
    電気学会/1994-04-01
  • シリコンのパルスレーザー誘起高速相変化
    村上浩一
    レーザー学会/1987-04-01
  • 不純物の準安定性・双安定性
    村上浩一
    応用物理学会（春季講演会）/1993-03-01
  • レーザーアブレーションのダイナミクスと非平衡物質の創製
    村上浩一
    レーザー学会学術講演会/1994-04-01
  • レーザーアブレーションによる電子励起原子の効果
    村上浩一; 牧村哲也
    応用物理学会（春季講演会）/1995-03-01
  • ﾚｰｻﾞｰｱﾌﾞﾚｰｼｮﾝの診断：時間分解レーザープラズマ軟Ｘ線吸収分光（ＬＡＰＸＳ）
    村上浩一; 牧村哲也; 大柳孝純; 依田修; 宮下敦巳
    応用物理学会(春季講演会）/1995-03-01
  • Ｓｉナノ微粒子の作製と可視発光
    村上浩一; 牧村哲也
    応用物理学会（秋季講演会）/1998-09-01
  • 半導体中の水素
    村上浩一; 深田直樹; 北島正弘; 石岡邦江; 藤村修三
    日本物理学会（春季講演会）/1998-03-01
  • レーザーを用いたナノテクノサイエンス（物質科学への応用）
    村上浩一
    2001-09-01
  • 半導体中の水素（ＧａＮシンポジウム）
    村上 浩一
    応用物理学会（春季講演会）/2002-03-01
  • 置換型窒素の形態と挙動
    村上浩一
    応用物理学会（秋季講演会）/2002-09-01
  • レーザーアブレーションによるシリコンナノ微粒子の創製と微粒子の表面修飾
    村上 浩一
    日本物理学会（秋季講演会）/2002-09-01
  • 無機透明材料のナノ加工を目指したレーザープラズマ軟X 線アブレーション
    牧村哲也; 釼持洋一; 宮本久生; 新納弘之; 中田芳樹; 村上浩一
    レーザー学会/2005-01-01
  • レーザープロセスによるＳｉナノ構造体の創製と不純物ドーピング制御
    村上浩一
    日本物理学会(春季講演会）/2007-03-01
  • Laser-induced nanoparticle Synthesis and Optical properties - Effects of Surface Modification and Impurity Doping -
    K.Murakami; +村上 浩一
    Gordon Research Conference on "Materials Processes far from Equilibrium"/2001-07-01
  • First-principle molecular dynamics study of bond disruption and formation in SiO2 upon irradiation
    Mauro Boero; A. Oshiyama; P.L. Silverstrelli; and K. Mur...
    International Conference on Defects in Semiconductors/2005-04-01
  • Direct Nanomachining of Inorganic Transparent Materials Using Laser Plasma Soft X-Rays
    Tetsuya Makimura; Hisao Miyamoto; Satoshi Uchida; Hiroyuk...
    International Conference on Laser Ablation (COLA05)/2005-04-01
  • Impurity Doping Effects and Hydrogen Passivation of Si Nanocrystals and Nanowires synthesized by Laser Ablation
    K.Murakami; +村上 浩一
    ICONO/LAT2005/2005-05-01
  • Micromachining of inorganic transparent materials using pulsed laser plasma soft X-rays at 10 nm
    Tetsuya Makimura; Youichi Kenmotsu; Hisao Miyamoto; Satos...
    SPIE/2005-01-01
  • In situ spectroscopic measurement of structural change in SiO2 during femtosecond laser irradiation
    K. Murakami; N. Fukata; Ymamoto; Hase; and Kitajima
    Internatinal Conference on laser Ablation (COLA’03)/2003-10-01
  • Impurity Doping and Surface Modification of Si Nanostructures by Laser Ablation
    K.Murakami; +村上 浩一
    Gordon Research Conference on Laser Interactions with Materials/2002-07-01
  • Silicon nanoparticles Synthesized by Laser Ablation and Impurity Doping Effects
    K.Murakami; +村上 浩一
    International Symposium on Manipulation of Atoms and Molecules by Electronic Excitation/2002-03-01
  • Fabrication of Siliconn nanoparticles by Laser ablation and Optical Properties
    T; Makimura; T. Mizuta; K. Murakami
    Plasma Science Symposium 2001/The 18th Symposium on Plasma Processing/2001-04-01
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Professional activities
1994 -- 1995The Japan Society of Applied Physics編集委員
1989-04 -- 1991-03Steering Comittee of SSDM
1995 -- 1997Cochairman of International Conference on Laser Ablation 1997 (Monterey)
1997 -- 1999Cochairman of International Conference on Laser Ablation 1999 (Goettingen)
2001 -- 2002Chairman of SPIE Synposium on Nanoscience Using Laser-Solid Interactions (2002, San Jose)
1999 -- 2001Chairman of International Conference on Laser Ablation 2001 (Tsukuba)
2002 -- 2003Cochairman of SPIE Synposium on Synthesis and Photonics of Nanoscale Materials (2003, San Jose)
1991-04 -- 1993-03Vice-Chairman of Steering Committee of SSDM
University Management
2002-04 -- 2006-03電子・物理工学専攻長
2004-04 -- 2006-03物理工学系長
2009-04 -- 2010-03数理物質科学研究科長
2003 -- 2007-03特別プロジェクト「ナノサイエンス」第一部門長

(Last updated: 2024-07-30)