牧村 哲也(マキムラ テツヤ)

研究者情報全体を表示

著書

• Direct nanomachining of inorganic transparent materials using laser plasma soft x-rays
  Makimura Tetsuya; Miyamoto Hisao; Uchida Satoshi; Niino ...
  COLA'05: 8TH INTERNATIONAL CONFERENCE ON LASER ABLATION/IOP PUBLISHING LTD/pp.279-284, 2007-01
• Nano- and micromachining of transparent materials using laser plasma soft X-Rays
  Makimura Tetsuya; Torii Shuichi; Niino Hiroyuki; Murakami...
  2009 LASERS & ELECTRO-OPTICS & THE PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS, VOLS 1 AND 2/IEEE/pp.466-467, 2009-01
• Micromachining of inorganic transparent materials using pulsed laser plasma soft X-rays at 10 nm
  Makimura T; Kenmotsu Y; Miyamoto H; Uchida S; Niino H; Mu...
  Photon Processing in Microelectronics and Photonics IV/SPIE-INT SOC OPTICAL ENGINEERING/pp.9-20, 2005-01